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ISO 250 SST Flangeversus160 XP

Axcelis ISO 250 SST Flange, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
ISO 250 SST FlangeAxcelis
160 XPVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis ISO 250 SST FlangeVarian 160 XP
Cited variants—
Specifications
ConfigurationP/N 3000521[2]—
Configuration (160 XP Ion variant)—150mm High Current IMP[1]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing