Comparison ledger
Axcelis 200 PCU, Varian Kestrel 650, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | Kestrel 650Varian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Varian Kestrel 650 |
| Cited variants |
| |
| Specifications | ||
| P/N | SC 4840 A[4] | — |
| Frequency | 50 Hz[4] | — |
| Phase | 3 Phase[4] | — |
| Voltage | 400 V[4] | — |
| Category | — | Ion Implantation[5] |
| Wafer Size | — | 8 inch[6] |
| Model | — | Kestrel 650[6] |
| OEM | — | Varian[6] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →