Comparison ledger
Axcelis 200 PCU, Ulvac SOPHI 200 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | SOPHI 200 IonUlvac |
|---|---|---|
| OEM | Axcelis | Ulvac |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Ulvac SOPHI 200 Ion |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | — |
| Phase | 3 Phase[3] | — |
| Voltage | 400 V[3] | — |
| Dose range (actual dose | — | 1010~1014 ions/cm2)[4] |
| Beam current (~500μA) - Throughput | — | more than 100 pieces/h (6in)[4] |
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