Comparison ledger
Axcelis 200 PCU, Axcelis NV 8250 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | NV 8250 IonAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Axcelis NV 8250 |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | 50/60 Hz[4] |
| Phase | 3 Phase[3] | 3 Phase[4] |
| Voltage | 400 V[3] | 208 VAC[4] |
| Configuration | — | Mid Current[4] |
| Input Current | — | 55 Amps[4] |
| Full Load Current | — | 88 Amps[4] |
| Max Load Current | — | 100 Amps[4] |
| Interrupt Capacit | — | 85 kA rms[4] |
| Wafer Size | — | 8 inch[4] |
| Type | — | Mid Current[4] |
| Wires | — | 5 Wires[4] |
| Interrupt Capacity | — | 85 kA rms[4] |
| Vintage | — | 1998[4] |
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