Comparison ledger
Axcelis 200 ACU, STS Multiplex ICP ASE Advanced Silicon Etch (ASE), side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | |
|---|---|---|
| OEM | Axcelis | STS |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | STS Multiplex ICP |
| Cited variants | — | |
| Specifications | ||
| Configuration | Parts Machine[3] | Currently configured for 150 mm wafers[1] |
| Manufacturer | Axcelis[3] | — |
| Model | 200 ACU[3] | Multiplex ICP ASE[1] |
| Tool type | Asher[3] | — |
| Wafer size | 200mm[5] | — |
| Serial number | AU6A356AH[5] | — |
| Computer system | M 200 PC, M 200[6] | — |
| Part number | SC 4572 A[6] | — |
| Volts | 208[6] | — |
| Amps | 30[6] | — |
| Equipment type | Asher[3] | — |
| Wafer configuration | 8 inch[4] | — |
| Voltage | — | 208V, 60Hz, 50A 3 phase[1] |
| Make | — | STS[1] |
| Wafer Sizes | — | 6 inch[1] |
| Configured wafer size | — | 150 mm wafers[1] |
| Load lock | — | Manual load lock[1] |
| Wafer handling | — | Manual load lock – Carousel Loader[7] |
| Backside cooling | — | He Backside Cooling 150mm clamp configuration[1] |
| RF power supply | — | ENI 300/30 Watt 13.56MHz RF power supply[1] |
| Upper electrode RF power supply | — | ENI ACG-10B 1KW 13.56MHz RF Upper Electrode power supply[1] |
| Turbo pump | — | Leybold Mag 2000CT Turbo pump with Leybold Mag Drive Controller[1] |
| Gas panel | — | OnBoard gas panel – 4 MFCs[1] |
| Electrical | — | 208V, 60Hz, 50A 3 phase[1] |
| Category | — | Etch[7] |
| Process architecture | — | Inductively coupled plasma etch architecture[7] |
| Option | — | MAC Cassette to Cassette Loader can be an option[1] |
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