Comparison ledger
Axcelis 200 ACU, Lam Research 2300 Selis, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | 2300 SelisLam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research 2300 Selis |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Parts Machine[2] | Chamber Only[1] |
| Manufacturer | Axcelis[2] | — |
| Model | 200 ACU[2] | 2300 Selis[6] |
| Tool type | Asher[2] | — |
| Wafer size | 200mm[4] | 12 inch[6] |
| Serial number | AU6A356AH[4] | — |
| Computer system | M 200 PC, M 200[5] | — |
| Part number | SC 4572 A[5] | — |
| Volts | 208[5] | — |
| Amps | 30[5] | — |
| Equipment type | Asher[2] | Etch chamber[6] |
| Wafer configuration | 8 inch[3] | — |
| OEM / manufacturer | — | Lam Research[6] |
| Category | — | Etch[7] |
| Process / description | — | Dielectric Etch – Process Chamber[1] |
| Version | — | 300 mm[1] |
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