Waferpedia

Comparison ledger

60 100 200 Steppersversus1000 Family

ASML 60 100 200 Steppers, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
60 100 200 SteppersASML
1000 FamilyUltratech
OEMASMLUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASML 60 100 200 SteppersUltratech 1000 Family
Specifications
Tool type—Photolithography step-and-repeat 1X stepper[1]
Optical design—Wynne Dyson[1]
Magnification—1X[1]
60 100 200 Steppers entry1000 Family entryAsk about these tools →Share experience with this comparison →

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Sources (1)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org