Comparison ledger
Applied Materials VIISTA Trident XP Ion Implant, Axcelis NV 8250, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VIISTA Trident XP Ion ImplantApplied Materials | NV 8250Axcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials VIISTA | Axcelis NV 8250 |
| Specifications | ||
| Process Type | Standard[2] | — |
| Scan Harness | Standard - Continuous[2] | — |
| Beamline | XP[2] | — |
| Profiler | Gen II Multipixel 2 piece cup[2] | — |
| Process Chamber Line Kit | Full Coverage[2] | — |
| Seismic Kit | Seismic[2] | — |
| Chiller | SMC Remote 20M[2] | — |
| Differential pumping | Standard[2] | — |
| Cryo Pump | OBIS 320FX w/ IS2000V(1) PSI[2] | — |
| Cryo Pump Facilities POC | SS Cryo Exh UP-Rough. DN-Hel.DN[2] | — |
| Power Kit | Std w/3 Pole 175A[2] | — |
| UPS | Standard UPS 3KVA[2] | — |
| Facilities (Air-N2-H2O) | Faci fr Bott w Manifold - Std[2] | — |
| Frequency | 60 Hz Operation[2] | — |
| Injector Kit | XP (LDPL) Vapo Ready[2] | — |
| Control system | w/ Hard disk drives[2] | — |
| Label Kit | Chinese Label Kit[2] | — |
| Load Lock Vent | Standard Finish[2] | — |
| Load Lock Vent Connection | Vent Connection Std Finish[2] | — |
| Elevator Chamber selection | Standard - TGV w/Peek[2] | — |
| OEM | Applied Materials / Varian[2] | — |
| Model | VIISTA Trident XP[2] | — |
| Orienter Selection | Laser - Belt drive 300mm[2] | — |
| Remote Harness Kit | 20M-Rem Harn/Heli-IS2000V[2] | — |
| Roughing Pump Supply | Customer Supplied Pumps Onsite[2] | — |
| Rough Pump Type | Edwards iGX100MTi - iGX100L[2] | — |
| Rough Pump Exhaust | Universal RP Exh - Floor[2] | — |
| Turbo Pump Supply | Customer Supplied Pumps Onsite[2] | — |
| Turbo Pump Type | Pfeiffer HI-PACE 2300[2] | — |
| Wafer Handler Side Window Kit | Side Window Kit[2] | — |
| VCS Software Package Version | VCS 9.XX (Latest revision)[2] | — |
| Plasma Flood Gun | XP-Standard Gas Box[2] | — |
| Gas Box | 10 Position[2] | — |
| Gas Box Exhaust | 10 Stk GB Dual Exh FM4910 - Up[2] | — |
| Manometer | Quad Mano 10Stk GB 0-1000 Pa[2] | — |
| Gas Stick Slot 1 | HP Ar/N2 CGA 580[2] | — |
| Gas Stick Slot 2 | PraxAir Boron VCR 1/4[2] | — |
| Gas Stick Slot 3 | PraxAir Arsine[2] | — |
| Gas Stick Slot 4 | PraxAir Phosphine - NSR[2] | — |
| Gas Stick Slot 5 | Praxair CO[2] | — |
| Gas Stick Slot 6 | PraxAir GeF4 - NSR[2] | — |
| Gas Stick Slot 7 | Praxair Boron VCR 1/4[2] | — |
| Gas Stick Slot 8 | XeH2[2] | — |
| Gas Stick Slot 9 | HP N2 CGA 580[2] | — |
| Purge Assembly Slot 7 & 10 | N2 w/Ext Fd - 10 Stick[2] | — |
| SS gaskets for all gas sticks | 10 stick gas box[2] | — |
| Argon External Purge Assembly | Ar Ext Purge w/Reg (Pos1)-Std[2] | — |
| Control System | with Hard disk drives[2] | — |
| Wafer Handling (Orienter) | Laser - Belt drive 300mm[2] | — |
| Configuration | — | Backside[3] |
| Wafer Sizes | — | 8 inch[1] |
| Energy Range | — | 0-250 keV[1] |
| Power Requirement | — | 208 VAC, 100 A, 50/60 Hz, 3 Phase[1] |
| Programmable Auto Tilt | — | 0-75 degrees[1] |
| Single Stage Extraction | — | 15-40 keV[1] |
| Ion Source Type | — | ELS[1] |
| Source Material Type | — | Moly[1] |
| Electrostatic Chuck (ESC) | — | Yes[1] |
| Parallel Beam using Hybrid Scanning | — | Yes[1] |
| 90 degrees Radially Indexed Dipole Magnet | — | Yes[1] |
| Signal Tower | — | Yes[1] |
| SECS II / GEM Interface | — | Yes[1] |
| Cassette Interface | — | Asyst Bolt-On SMIF (2), Cassette Stages (3), Automatic Flat/Notch Alignment, Programmable Flat Orient[1] |
| Controller | — | Sun Sparc Station V, Application SW Ver. 4.3.2, Auto Start-Up & Computer Monitoring[1] |
| Pump / Cryogenics | — | Source Pump: TMP; Beam Pump: TMP (2) and Cryo Pump (8" Torr, Non On-board); End Station Pump: 2 Cryo Pump (8" Torr, Non On-Board); Cryo Compressor: CTI 8500; Remote Disk Chiller[1] |
| Gas Configuration | — | AsH3 - SDS, PH3 - SDS, BF3 - SDS, Ar - HP[1] |
| Energy Filter System Option | — | Yes[1] |
| Vintage | — | 1999 (Backside)[3] |
| Source Pump | — | TMP[1] |
| Beam Pump | — | TMP (2)[1] |
| End Station Pump | — | 2 Cryo Pump (8" Torr, Non On-Board)[1] |
| Cryo Compressor | — | CTI 8500[1] |
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