Comparison ledger
Applied Materials SEMVision G 3 Lite DR-SEM, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEMVision G 3 Lite DR-SEMApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer rotation option | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials SEMVision | KLA .496 PSL Wafer |
| Specifications | ||
| Software version | 5.3.100[1] | — |
| Loader | 3 TDK ADO with RFID[1] | — |
| Robot | Brooks, single blade with through beam mapper[1] | — |
| SEM system | G3 column (FEI / Denka tip)[1] | — |
| Optical systsem | OM with 5x, 20x, 100x[1] | — |
| Configuration | EDX option[1] | NIST Traceable[3] |
| Wafer size | Wafer rotation option[1] | 8 inch[3] |
| Stage wafer holder | electrostatic chuck[1] | — |
| OEM | Applied Materials[1] | — |
| Model | SEMVision G 3 Lite DR-SEM[1] | — |
| Category | Metrology & Inspection[2] | Metrology & Inspection[4] |
| Tool type | Defect review scanning electron microscope[1] | — |
| Optical system | OM with 5x, 20x, 100x[1] | — |
| EDX option | Present[1] | — |
| Tilt option | Present[1] | — |
| Wafer rotation option | Present[1] | — |
| Condition | Fully refurbished[1] | — |
| Traceability | — | NIST Traceable[3] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[3] |
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