Waferpedia

Comparison ledger

PLADversus160 XP

Applied Materials PLAD, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
PLADApplied Materials
160 XPVarian
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials PLADVarian 160 XP
Cited variants—
Specifications
ManufacturerApplied Materials[2]—
ModelPLAD[2]—
CategoryIon Implantation[2]—
Tool typePlasma Doping Ion Implanter[3]—
Wafer size300 mm[3]—
Configuration (160 XP Ion variant)—150mm High Current IMP[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]waferpedia.comwaferpedia.com
  3. [3]fabsurplus.comfabsurplus.com