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Comparison ledger

NanoSEM 3 D CD-SEMversus.204 PSL Wafer

Applied Materials NanoSEM 3 D CD-SEM, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
NanoSEM 3 D CD-SEMApplied Materials
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2001 Vintage year—
Control system——
Generation——
FamilyApplied Materials NanoSEM 3 D CD-SEMKLA .204 PSL Wafer
Specifications
ConfigurationSoftware Version 14.3.0[1]NIST Traceable[2]
Supply Voltage120 / 208 VAC[1]—
Full load Current10 A[1]—
Largest Load Ampere Rating8 A[1]—
Wafer Size6 inch[1]8 inch[2]
Software Version14.3.0[1]—
Frequency50/60 Hz[1]—
Number of Wires5[1]—
Traceability—NIST[3]
Compatible Tools—Surfscan 6xy0, Sp1[2]
NIST Traceable—Yes[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com