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Comparison ledger

Compass 200 Waferversus1.112 PSL Wafer

Applied Materials Compass 200 Wafer, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Compass 200 WaferApplied Materials
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials Compass 200KLA 1.112 PSL Wafer
Specifications
Phase3 Phase[1]—
Voltage208vac[1]—
OEMApplied Materials[1]—
ModelCompass 200[1]—
Equipment typeWafer Inspection System[1]—
Power3 Phase - 208vac[1]—
Vintage2000[1]—
Configuration—NIST Traceable[2]
Wafer Size—8 inch[2]
NIST Traceable—True[2]
Compatible Tools—Surfscan 6xy0 and Sp1[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com