Waferpedia

Comparison ledger

5500 100 Dversus1000 Family

Applied Materials 5500 100 D, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
5500 100 DApplied Materials
1000 FamilyUltratech
OEMApplied MaterialsUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 5500 100 DUltratech 1000 Family
Specifications
equipmentTypeStepper / Scanner[1]—
categoryLithography[2]—
vintageYear1996[1]—
Tool type—Photolithography step-and-repeat 1X stepper[3]
Optical design—Wynne Dyson[3]
Magnification—1X[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]en.wikipedia.orgen.wikipedia.org