Waferpedia

Comparison ledger

0720 06060 PartversusCM 210

Applied Materials 0720 06060 Part, Signatone CM 210, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0720 06060 PartApplied Materials
CM 210Signatone
OEMApplied MaterialsSignatone
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0720 06060 PartSignatone CM 210
Specifications
ConfigurationContact Pin 24-20 Awg Crimp Gold Flash[1]—
Chuck XY Stage Travel Range—205 mm x 205 mm (8.07 x 8.07 in)[2]
Chuck XY Travel Resolution (Standard)—14 μm Per Degree of Knob Rotation[2]
Chuck XY Travel Resolution (Fine)—1.5 μm Per Degree of Knob Rotation[2]
Chuck Z Stage Travel Range—2.5 mm (0.01 in)[2]
Chuck Z Stage Repeatability—± 1.0 μm[2]
Chuck Theta Stage Travel Range—± 11° (22°)[2]
Chuck Theta Stage Accuracy—< 1.0 μm (measured at the edge of the 200 mm chuck)[2]
Probe Platen Material—Nickel Plated Steel (Aluminum optional)[2]
Probe Platen Dimensions—L = 580mm x W = 637mm x H = 12.7mm[2]
Max Number of Micro Positioners—10x DC/HV or 2x RF + 4x DC or 4x RF + 2x DC or 2x CAP + 4x DC[2]
Contact Repeatability—< 1 μm (0.04 mils) by Manual Control[2]
Standard Wafer Chuck Diameter—203 mm[2]
Standard Wafer Chuck Surface Planarity—±6.5 μm[2]
Standard Wafer Chuck Rigidity—<3 μm / 10N at edge of the chuck[2]
Coax Chuck Operation Voltage—-200V to +200V DC[2]
Coax Chuck Max Voltage (Chuck to GND)—500 V DC[2]
Coax Chuck Isolation—> 150 GΩ[2]
Triax Chuck Isolation (Force to Guard @ 10V)—> 2 TΩ[2]
System Dimensions (Optional Table)—660 x 889 x 610 mm (26 x 35 x 24 in)[3]
System Weight (Optional Table)—109 kg (240 lbs)[3]
System Dimensions Including Table—863 x 1085 x 1370 mm (34 x 42.7 x 53.95 in)[3]
System Weight Including Table—385 kg (849 lbs)[3]
Available Thermal Chuck Options—Standard Hot (25°C to 300°C), Hot/Triax (25°C to 200°C), Hot/3kV Triax (25°C to 200°C)[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]signatone.comsignatone.com
  3. [3]microworld.eumicroworld.eu