Waferpedia

Comparison ledger

0242-36515 RTP XE Chamber Temperature Match KitversusCentura RTP

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Applied Materials Centura RTP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Centura RTPApplied Materials
OEMApplied MaterialsApplied Materials
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2008 Vintage
Control system——
Generation——
Family—Applied Materials Centura
Specifications
Configuration—(1)x DPN[1]
Wafer Sizes—12 inch[1]
Chamber Configuration—1x DPN, 2x RTP[1]
Vintage—2008[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing