Waferpedia

Comparison ledger

0041-39086 ESC Partversus210RL-B

Applied Materials 0041-39086 ESC Part, Plasma-Therm 210RL-B, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
210RL-BPlasma-Therm
OEMApplied MaterialsPlasma-Therm
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Plasma-Therm 210RL-B
Specifications
Process Type—Reactive Ion Etching (RIE)[1]
Category—Dry Etch[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]nanousers.mit.edunanousers.mit.edu