Waferpedia

Comparison ledger

0041-39086 ESC PartversusTCP 9600

Applied Materials 0041-39086 ESC Part, Lam Research TCP 9600, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
TCP 9600Lam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research TCP 9600
Specifications
Configuration—Index Type[1]
Wafer Size—8 inch[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing