Waferpedia

Comparison ledger

0041-39086 ESC PartversusRainbow 4420

Applied Materials 0041-39086 ESC Part, Lam Research Rainbow 4420, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Rainbow 4420Lam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1994 Vintage year
Control system——
Generation——
Family—Lam Research Rainbow 4420
Cited variants—
  • Rainbow 4420 Plasma Etcher, 8"[1]
Specifications
Configuration—Refurbished[2]
Software version—Envision 1.5 Release[1]
Handler System—Harmonics Arm (2)[1]
Volts—208[1]
Wafer Shape—8" flat zone[3]
Process—Poly Etch[3]
Software—Envision 1.5[3]
Wafer Aligner—Universal[4]
Wafer Sizes—8 inch[1]
Software Version—Envision 1.5[1]
CIM SECS—Yes[1]
Factory Interface—SMIF (2)[1]
LL Pump—Yes[1]
TCU 2080—Yes[1]
AC Rack—Yes[1]
PC Pump—Yes[1]
Vintage—1994[1]
Dry Pump—Yes[3]
Chiller—Yes[3]

Plan your fab

Building a Etch process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing