Comparison ledger
Applied Materials 0041-39086 ESC Part, Lam Research A 6 Exelan HPT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | A 6 Exelan HPTLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1997 manufactured |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research A 6 Exelan HPT |
| Specifications | ||
| Configuration | — | 3 Chambers[1] |
| Manufacturer | — | Lam Research[2] |
| Model | — | Alliance A 6 Exelan HPT Dielectric[2] |
| Category | — | Etch[2] |
| Wafer size | — | 8 inch (200 mm)[2] |
| Chamber configuration | — | Exelan HPT chambers (2) and 4520 chamber[2] |
| Vacuum & pumping | — | 1 TM Pump to Dual Pump (1 for Load Lock / 1 for TM)[3] |
| Gas & chemistry | — | To use 10 Gases, the Gas Box needs to be enhanced[3] |
| Configuration & options | — | 3 Chambers[1] |
| Condition | — | Refurbished[1] |
| Last confirmed date | — | November 12, 2024[1] |
| Vintage year | — | 1997[2] |
| Gas box note | — | To use 10 gases, the Gas Box needs to be enhanced[1] |
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