Waferpedia

Comparison ledger

0041-39086 ESC Partversus2300 Exelan Dielectric

Applied Materials 0041-39086 ESC Part, Lam Research 2300 Exelan Dielectric, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research 2300 Exelan Dielectric
Specifications
Wafer Size—12 inch (300mm)[1]
Process—Dielectric Etch[2]
Node Capability—sub-65 nm (validated for front- and backend)[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]newsroom.lamresearch.comnewsroom.lamresearch.com