Comparison ledger
Applied Materials 0041-39086 ESC Part, Lam Research 2300 e 5 Kiyo, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | 2300 e 5 KiyoLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Lam Research 2300 |
| Specifications | ||
| Configuration | — | 3 Chamber + 1 Strip[1] |
| Loadport | — | TDK TAS300[1] |
| ATM Robot | — | Kawasaki P/N 3NT510B-A002[1] |
| TM Robot | — | Brooks 201600-294-0002[1] |
| MKS E28D-29237 Process Vacuum Gauge | — | 0.1 Torr[1] |
| MKS 625D-30518 Chamber Vacuum Gauge | — | 1 Torr[1] |
| Number of Chambers | — | 3 Chamber + 1 Strip[1] |
| Turbo Pump | — | Edwards STP-XA3203CV[1] |
| Turbo Pump Controller | — | Edwards SCU-1600[1] |
| Bias RF Generator | — | Lam 3156110-214[1] |
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