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0041-39086 ESC PartversusM 712 M 711 Dry Etch Process

Applied Materials 0041-39086 ESC Part, Hitachi M 712 M 711 Dry Etch Process, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
M 712 M 711 Dry Etch ProcessHitachi
OEMApplied MaterialsHitachi
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Hitachi M 712 M 711 Dry Etch Process
Cited variants—
  • M 712 / M 711[1]
Specifications
Software revision—1.07 PMv.02.16M[2]
Configuration—Gaspanel included[2]
ESC Type—Bipolar[1]
Endpoint type—Hitachi EPD monitor ePMv02.16M[1]
Wafer size—12 inch[2]
TMP—SHIMAZU EC TMP[1]
TMP controller—3203LMC-K1 EC TMP Controller[1]
Source generator—DAIHEN ES7-IIA EC Source generator[1]
Bias generator—PEARL CF-500-400K EC Bias generator[1]
Gas configuration—Line / EC1 / Strip - 1 / Ar - 2 / C12 - 3 / SF6 - 4 / HBr - 5 / CF3 - 6 / CH4 - 7 / NF3 - 8 / O2 - 9 / N2 - 10/ SF6 - 11/ C12 - 12/ O2[1]
Gas panel included—Yes[2]
Vintage—2006[2]
0041-39086 ESC Part entryM 712 M 711 Dry Etch Process entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing