Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura MXP

Applied Materials 0041-39086 ESC Part, Applied Materials Centura MXP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Centura MXPApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura MXP
Specifications
Configuration—3 CH[1]
Phase—3 Phase[1]
Frequency—50 Hz[1]
Voltage—208 VAC[1]
Wires—Four[2]
Full Load Current—240 A[2]
H/E 1—0242-02163 REV D[3]
UPS—DPWR 35611[3]
H/E (CH-B_C_D_Wall)—0242-02163 REV D[3]
Chambers—3 CH[1]
Robot—HP Robot[1]
Power Supply Voltage—208 VAC[1]
Power Supply Frequency—50 Hz[1]
Number of Wires—Four / 4 Wires[1]

Plan your fab

Building a Etch process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing