Comparison ledger
Applied Materials 0021 32427 Part, YES 253B-20-40-2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0021 32427 PartApplied Materials | 253B-20-40-2YES |
|---|---|---|
| OEM | Applied Materials | YES |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0021 32427 Part | YES 253B-20-40-2 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Cooling Plare, Countermatch,300mm Produc[2] | — |
| Model | — | 253B-20-40-2[1] |
| Type | — | Exhaust Throttle Valve[1] |
| Valve mechanism | — | butterfly valve[1] |
| Controller compatibility | — | Type 651, 652, 152G, or 252 (revision D or later) controllers[1] |
| Flange types available | — | ASA, KF Style ISO, NW Style ISO, CF, and JIS[1] |
| Inside diameter | — | 0.779 in (19.8 mm)[1] |
| Mounting flange | — | KF-40[1] |
| Outside diameter | — | 2.75 in (69.9 mm) unheated; 3.00 in (76.2 mm) with heater option[1] |
| Controllable conductance | — | 0.25 to 31 l/sec[1] |
| Closed leakage | — | <10^-7 Torr l/sec[1] |
| Flapper seal | — | None[1] |
| Thickness | — | 2.25 in (57.2 mm)[1] |
| Overall height | — | 8.64 in (219.5 mm) unheated; 8.81 in (223.8 mm) with heater option[1] |
| Number of bolt holes | — | N/A[1] |
| Bolt hole diameter | — | N/A[1] |
| Bolt circle diameter | — | N/A[1] |
| Flange O-ring groove ID | — | N/A[1] |
| Valve body operating temperature | — | 0° to 90° C (32° to 194° F) max.[1] |
| Valve motor ambient operating temperature | — | 0° to 70° C (32° to 158° F) max.[1] |
| Speed (open to close) | — | 7.5 sec[1] |
| Power input | — | ±15 VDC, 1 Amp (30 Watts) nominal, user-supplied[1] |
| Nominal Inside Diameter | — | 0.779 in (20 mm)[3] |
| Flange Size | — | NW40[3] |
| Flange Type | — | ISO-KF (KF Style ISO)[3] |
| Flapper O-ring | — | No[3] |
| External Leak Rate | — | 1 x 10^-8 scc/sec He[3] |
| Closed Leakage | — | < 1 x 10^-7 Torr l/s[3] |
| Controllable Conductance (min) | — | 0.25 l/sec[1] |
| Controllable Conductance (max) | — | 31 l/sec[1] |
| Valve Speed (standard) | — | 7.5 sec open to close[3] |
| Resolution (standard) | — | 1/10,000[3] |
| Drive | — | Mechanical (non belt) drive with integral cosine generator[3] |
| Differential Pressure Across Valve | — | 1 Atmosphere (15 psig)[3] |
| Maximum Valve Body Operating Temperature | — | 0 - 90°C[3] |
| Valve Motor Ambient Operating Temperature | — | 0 - 70°C max[3] |
| Exposed Materials | — | 316 stainless steel and seal material[3] |
| Thickness (C) | — | 2.25 inches (57.2 mm)[1] |
| Overall Height (unheated) | — | 8.64 inches (219.5 mm)[1] |
| Overall Height (with heater option) | — | 8.81 inches (223.8 mm)[1] |
| Closed Leakage (sealing version -1) | — | < 10^-7 Torr l/sec[1] |
Plan your fab
Building a Lab & Support Equipment process? Get a complete equipment list.
Open the fab equipment planner →