Waferpedia

Comparison ledger

0020 81665 Partversus4520 i XL Stand Alone

Applied Materials 0020 81665 Part, Lam Research 4520 i XL Stand Alone, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
0020 81665 PartApplied Materials
4520 i XL Stand AloneLam Research
OEMApplied MaterialsLam Research
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 81665 PartLam Research Rainbow 4520
Specifications
ConfigurationGuide, Fiber Mount, Ude, Lk[1]Turbo HGP + Controller[2]
Make—Lam[2]
Model—4520 i XL[2]
Wafer size—8 inch[2]
0020 81665 Part entry4520 i XL Stand Alone entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing