Waferpedia

Comparison ledger

0020 18455 PartversusAnelva EC 7001

Applied Materials 0020 18455 Part, Canon Anelva EC 7001, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
OEMApplied MaterialsCanon
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartCanon Anelva
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]Ti, Ta, Al, W available[2]
Substrate Bias—Available[2]
Annealing Compatibility—600*C[2]
Target Size—4 inch[2]
Tool type—Sputtering system[2]
Materials available—Ti, Ta, Al, W[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing