Waferpedia

Comparison ledger

0020 17485 PartversusSpector Ion Beam

Applied Materials 0020 17485 Part, Veeco Spector Ion Beam, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
OEMApplied MaterialsVeeco
CategoryDepositionDeposition
Wafer size—Wafer Stage Motor & Drive
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartVeeco Spector
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[1]Missing Cryo pump and compressor[2]
Target Assembly—2 sets (including magnets)[3]
Magnetron Amplifier (SR810, SR830)—2 sets[3]
Wafer size—Wafer Stage Motor & Drive[3]
Optical Components—Removed, Only ion source control module retained[3]
Heating System—Controller modified[3]
16 Ion Source—Normal[3]
12 Ion Source—Normal[3]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing