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0010-47763 ASSY ESC Bonded Monopolar Dual Heatedversus2200 EVO Plus

Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, Besi 2200 EVO Plus, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBesi
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedBesi 2200
Specifications
ConfigurationRefurbished[1]Buffer Line Input[2]
Make—Besi / Datacon[3]
Model—2200 EVO Plus[3]
Bond Force—0.5N to 75N programmable[4]
X/Y placement accuracy—± 7 µm @ 3s[4]
Theta placement accuracy—± 0.10° @ 3s[4]
Die attach throughput—up to 7,000 UPH/module[4]
Flip chip throughput with dipping—up to 2,500 UPH/module[4]
Flip chip throughput without dipping—up to 3,200 UPH/module[4]
Heated bond head—up to 450°C (optional)[4]
UV curing—365 nm & 405 nm[4]
Machine dimensions (LxDxH)—1,160 mm x 1,225 mm x 1,750 mm[4]
Weight—1,300 kg[4]
Wafer size—4" - 12" (SEMI M1)[4]
Frame size—FF070, FF105, FF108, FF123; automatic change (others on request)[4]
Substrate working range—13” x 8” (325 mm x 200 mm)[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]besi.combesi.com