Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusVision 2000-A

Applied Materials 0010-22161 High EFF RF Match, MKS Vision 2000-A, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsMKS
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchMKS Vision 2000-A
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Minimum detectable partial pressure—<2.7e-10 Pa (<2e-12 Torr)[3]
Inlet type—Modular UniBloc inlet with all metal seals and field serviceable parts[3]
Inlet temperature range—Up to 200°C (consult factory for models up to 300°C)[3]
Sample coupling—Direct coupling for a sample transfer tube[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]api.p1.mks.comapi.p1.mks.com