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0010-22161 High EFF RF MatchversusSFS 6220

Applied Materials 0010-22161 High EFF RF Match, KLA SFS 6220, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
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Control system——
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FamilyApplied Materials 0010-22161 High EFF RF MatchKLA SFS 6220
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Defect Sensitivity—0.1 micron (PSL STD)[3]
Haze Sensitivity—0.02 ppm[3]
Haze Resolution—0.002 ppm[3]
Accuracy—within 1%[3]
Wavelength—488nm (Argon Ion laser)[3]
Wafer Size (supported)—4 - 8 inch[3]
Calibration—NIST Calibrated[3]
Power Requirements—208V/60Hz, 17A[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]jenesisequipment.comjenesisequipment.com