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0010-22161 High EFF RF MatchversusOP 5220 Film Thickness Measurement

Applied Materials 0010-22161 High EFF RF Match, KLA OP 5220 Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchKLA OP
Specifications
MakeApplied Materials[1]KLA / Therma-wave[4]
Model0010-22161[1]OP 5220[4]
DescriptionHTESC PH 1 REV A[2]Film Thickness Measurement[4]
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Tooling, lamp Spectral Cal[3]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing