Waferpedia

Comparison ledger

0010-22161 High EFF RF Matchversus6220

Applied Materials 0010-22161 High EFF RF Match, KLA 6220, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
6220KLA
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchKLA 6220
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]6220[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Inspection type—Particle inspection system[4]
Wafer sizes—2", 3", 4", 6", and 8" wafers capable[4]
Illumination source—30 mW argon-ion laser, 488 nm wavelength[4]
Throughput—100 wph (200 mm) at 0.12 mm[4]
Sensitivity—90 nm sensitivity, >80% capture rate[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]Equipment inventory listing
  4. [4]classoneequipment.comclassoneequipment.com
  5. [5]gsemi.comgsemi.com