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0010-22161 High EFF RF MatchversusPH 402 Environmental

Applied Materials 0010-22161 High EFF RF Match, ESPEC PH 402 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsESPEC
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchESPEC PH 402 Environmental
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]PH 402[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Interior Volume—35.3 cubic feet (1000 liters)[3]
Interior Dimensions (W × D × H)—1000 × 1000 × 1000 mm[3]
Temperature Range—45°C to 200°C[3]
Type—Horizontal-type industrial oven[3]
Configuration—Power Requirements:[3]
Voltage—208 V (±5%)[3]
Phase—3-phase, 60 Hz[3]
Manufacturer—ESPEC[3]
Service amps—30 service amps (19 FLA)[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing