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0010-22161 High EFF RF MatchversusBTZ 175

Applied Materials 0010-22161 High EFF RF Match, ESPEC BTZ 175, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
BTZ 175ESPEC
OEMApplied MaterialsESPEC
Category——
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FamilyApplied Materials 0010-22161 High EFF RF MatchESPEC BTZ 175
Specifications
MakeApplied Materials[1]ESPEC[3]
Model0010-22161[1]BTZ 175[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Temperature Range—-123°C - 304°C[3]
Full Load Amp—14[4]
Largest Motor FLA—3.7[3]
Maximum Capacity Allowed—20[3]
Product family—Criterion benchtop chamber[5]
Temperature range—-123°C to 304°C[3]
Interior volume—1.5 cu. ft. (42 liters)[5]
Interior dimensions—19.6" x 11" x 12" (500 x 280 x 300 mm)[5]
Exterior dimensions—30.25" x 33.5" x 34" (770 x 850 x 865 mm)[5]
Average change rate—5°C/min (empty, per IEC 60068 3-5, at supply sensor)[5]
Power—208/230V 1ph 60Hz (NEMA 6-20 plug) 20 Service Amps[5]
Heat to room—9,000 BTU/Hr.[5]
Maximum sound level—65 dBA (1 meter away)[5]
Temperature fluctuation—±0.5°C[5]
Temperature gradient—±1.5°C (below 100°C)[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]espec.comespec.com