Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Balzers Pfeiffer TPU 240 Turbomolecular, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Balzers |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Balzers Pfeiffer TPU |
| Cited variants | — |
|
| Specifications | ||
| Make | Applied Materials[2] | Balzers Pfeiffer[4] |
| Model | 0010-22161[2] | TPU 240[4] |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | Refurbished[1] |
| Stock Number | BM6628[3] | — |
| Volume Flow Rate | — | 230[4] |
| Manufacturer | — | Balzers Pfeiffer[4] |
| Part Number | — | PMP01330A[1] |
| High-Vacuum Inlet Flange | — | DN 100 CF-F (6" ConFlat Fixed)[1] |
| Foreline / Exhaust Flange | — | DN 25 ISO-KF (NW25)[1] |
| Pumping Speed (N2) | — | 230 L/s[1] |
| Pumping Speed (He) | — | 240 L/s[1] |
| Pumping Speed (H2) | — | 210 L/s[1] |
| Compression Ratio (N2) | — | 1 × 10^8[1] |
| Ultimate Base Pressure | — | ≤ 1 × 10^-11 mbar (≤ 7.5 × 10^-12 Torr)[1] |
| Nominal Rotational Speed | — | 60,000 RPM[1] |
| Ramp-Up / Start Time | — | ≈ 1 to 3 minutes[1] |
| Cooling Method | — | Natural Convection / Forced Air / Water-Cooling (15 L/h at 15 °C)[1] |
| Lubricant Charge | — | 8 cm^3 F4 / F5 Operating Fluid Wick Compatible Controllers[1] |
| Weight | — | 9.0 kg (19.8 lbs)[1] |
| Equipment type | — | Turbomolecular pump[4] |
| Part number | — | PM P01 330 A (PMP01330A)[1] |
| Lubricant charge | — | 8 cm3 F4 / F5 operating fluid wick compatible[1] |
| Compatible controllers | — | Pfeiffer TCP 121 / TCP 380 / TCP 300 series[1] |
| Type of product | — | turbo pump[5] |
| Inlet | — | 6" conflat[5] |
| Exhaust | — | KF25[5] |
| Vent valve | — | fixed[5] |
| Pumping speed | — | 230 l/s (N2)[5] |
| Compression ratio | — | 10^8 (N2)[5] |
| Recommended controller | — | TCP-121, TCP-380[5] |
| Recommended backing pump | — | DUO 016B[5] |
| OEM | — | Balzers Pfeiffer[4] |
| Device type | — | Turbomolecular pump[4] |