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Comparison ledger

0010-21246 Partversus253B-1-40-2

Applied Materials 0010-21246 Part, YES 253B-1-40-2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsYES
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—YES 253B-1-40-2
Specifications
Product type—Exhaust throttle valve, butterfly valve[1]
Differential pressure across valve—1 atm. (15 psig) max.[1]
External leakage at shaft seal—1 x 10^-7 scc/sec He[1]
Materials exposed to process—316L SS, Viton (where Viton is used, other materials are available; consult factory)[1]
Shaft seal—Viton[1]
Resolution—Standard: 1/10,000; Fast Motor Option: 1/2800[1]
Speed (open to close)—Standard: 7.5 sec; Optional: < 2 sec[1]
Valve body operating temperature—0° to 90° C (32° to 194° F) max.[1]
Valve motor ambient operating temperature—0° to 70° C (32° to 158° F) max.[1]
Driver/gear assembly width—3.75" square (95 mm)[1]
Compatible controllers—Type 651, 652, 152G, or 252 (revision D or later) controllers[1]
Flange types available—ASA, NW Style ISO, KF Style ISO, CF, JIS[1]
Mounting—The valve may be mounted in any position by clamping its KF style flanges or through bolting its flanges to a pair of mating flanges.[1]
Electrical connector—15-pin Type "D" connector located at the end of the 6" pigtail cable[1]
Closed leak rates for sealing butterfly valves—Less than 1.3 x 10^-7 scc/sec when new[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu