Comparison ledger
Applied Materials 0010-21246 Part, KLA Puma 9120, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | Puma 9120KLA |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | KLA Puma 9120 |
| Specifications | ||
| Tool type | — | Dark field defect detection tool[1] |
| Wafer sizes | — | 200 mm and 300 mm[1] |
| Cameras | — | 2[1] |
| Loader type | — | Dual open cassette loader[1] |
| Number of inspection pixel models | — | 3[1] |
| Pixel sizes | — | sL5, sL8, sL20[1] |
| Software option | — | Array Mode Algorithm: Yes[1] |