Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusX'Pert Pro

Applied Materials 0010-18024 Pyrometer Assembly, Malvern Panalytical X'Pert Pro, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
X'Pert ProMalvern Panalytical
OEMApplied MaterialsMalvern Panalytical
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyMalvern Panalytical X'Pert Pro
Cited variants—
  • X'Pert Pro MPD[1]
  • X'Pert Pro MRD[2]
Specifications
ConfigurationCapable of working on Applied Materials Radiance[3]Precision Powder[4]
Type—PW3040/80[4]
Vintage—2011[4]
X-ray source—Cu Kα radiation (Kα = 1.54187 Å)[1]
Goniometer radius—240 mm[1]
Geometry—Bragg-Brentano (theta-theta system, vertical goniometer)[1]
Scan range of 2theta—3°-150°[1]
Minimum-Maximum step size—0.001°-1.27°[1]
Automatic sample changer—15 samples[1]
Incident PreFIX Module—Fixed divergence slit holder[1]
Focusing X-ray Mirror—For Cu Kα[1]
Diffracted PreFIX Module—X’Celerator lineal Detector[1]
Available software—X’pert Data Collector, X’pert Data Viewer, X’pert Highscore, X’pert EasySAXS[1]
Detector—PIXcel Detector[2]
Temperature chamber—Anton Paar DHS 1100 Dome hot stage[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]icn2.caticn2.cat
  2. [2]icn2.caticn2.cat
  3. [3]inventory listing
  4. [4]inventory listing