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0010-18024 Pyrometer AssemblyversusSurfscan SP 1 Classic Particle Defect

Applied Materials 0010-18024 Pyrometer Assembly, KLA Surfscan SP 1 Classic Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA Surfscan
Cited variants—
  • Surfscan SP1KLA Surfscan[1]
Specifications
ConfigurationCapable of working on Applied Materials Radiance[2]4 stations[3]
Manufacturer—KLA[3]
Model—Surfscan SP 1 Classic[3]
Wafer sizes—6, 8 inch[3]
Tool type—particle defect inspection system[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com