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0010-18024 Pyrometer Assemblyversus7600 Patterned Wafer Particle Defect

Applied Materials 0010-18024 Pyrometer Assembly, KLA 7600 Patterned Wafer Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—25 Wafer Slot Cassette
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA 7600 Patterned Wafer Particle Defect
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Cassette Transfer[3]
Wafer size—25 Wafer Slot Cassette[2]
Process Vac—23 InHg[3]
Inlet Power—1 line of 208 Vac 15 Amp[2]
Manufacturer—KLA[2]
Category—Metrology & Inspection[2]
Cassette transfer—Included[2]
Scan stage—Included[2]
Wafer transfer—Included[2]
Boat elevator / robot transfer—Included[2]
Exhaust—Exhaust with Blower for laser cooling[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing