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0010-18024 Pyrometer Assemblyversus5100 XP Overlay Measurement

Applied Materials 0010-18024 Pyrometer Assembly, KLA 5100 XP Overlay Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA 5100
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Software Version—14.70.01[2]
Robot Type—KLA Internal[2]
Handler—x3 Open Cassette[2]
Wafer Size—8 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing