Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Plasma-Therm Unaxis 790, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Unaxis 790Plasma-Therm |
|---|---|---|
| OEM | Applied Materials | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Plasma-Therm Unaxis 790 |
| Cited variants | — | |
| Specifications | ||
| OEM | Applied Materials[5] | — |
| Model | 0010-16392[5] | — |
| Type | ESC Assembly[5] | — |
| Wafer Size | 300 mm[6] | — |
| Electrode Configuration | Dual[6] | — |
| Phase | — | 3 Phase[7] |
| Configuration | — | 5 Wire[7] |
| Voltage | — | 208 Vac[7] |
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