Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research 9600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 9600Lam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research TCP 9600 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 8 inch[3] |
| Electrode Configuration | Dual[2] | — |
| Voltage | — | 208 V[3] |
| Configuration | — | Envision Software[3] |
| DSQ / Exit Load Lock | — | Heated paddle[4] |
| Software | — | Envision Software[3] |
| Load/Unload | — | Hine Cassette Indexer[3] |
| Entrance Load-lock | — | Present[3] |
| Remote AC Panel | — | Present[3] |
| Main Chamber Clamping | — | Bottom Actuated Clamping System[3] |
| Main Chamber Turbo Pump | — | Adixen Alcatel ATH 1300[3] |
| Main Chamber Valve | — | VAT 65[3] |
| Main Chamber Gas Configuration | — | 6 Gasses[3] |
| Main Chamber RF Generators | — | RPG 1250[3] |
| DSQ/Exit Load Lock Gas Configuration | — | 3 Gases[3] |
| DSQ/Exit Load Lock | — | WVDS, Heated Paddle, APM (Atmospheric Passivation Module)[3] |
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