Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Varian VHS 4, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | VHS 4Varian |
|---|---|---|
| OEM | Applied Materials | Varian |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Varian VHS |
| Specifications | ||
| Configuration | HE, BIAS[1] | — |
| Asset Number | 70430[1] | — |
| Type | High Efficiency RF Match - HE, BIAS[1] | — |
| Pumping Speed | — | 1200 l/s[2] |
| ASA Type Flange | — | 9 in. OD, 5.9 in. ID[2] |
| Voltage | — | 120V, 50/60 Hz[2] |
| Voltage/Frequency | — | 120V, 50/60 Hz[2] |
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