Comparison ledger
Applied Materials 0010-13622 RF Match for, Denton Vacuum Integrity 14 Thermal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | Integrity 14 ThermalDenton Vacuum |
|---|---|---|
| OEM | Applied Materials | Denton Vacuum |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Denton Vacuum Integrity 14 Thermal |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | with Cryo pump[2] |
| Model | 0010-13622[1] | — |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Chamber Material | — | Stainless steel[3] |
| Chamber Internal Dimensions | — | Length: 13 inches, Diameter: 14.5 inches, Height: 18 inches[3] |
| Pump Type | — | CTI 8 cryopump[3] |
| Ultimate Vacuum | — | < 5e-7 mbar[3] |
| Evaporation Source | — | Dual-source thermal evaporator[3] |
| Deposition Monitor | — | Inficon crystal deposition rate monitor[3] |
| Substrate Holder | — | Single-dome rotating substrate holder with variable-speed control[3] |
| Optional Accessory | — | 2kVA evaporation transformer[3] |
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