Comparison ledger
Applied Materials 0010-13622 RF Match for, CHA Mark 40 CV RH-PC/PLC Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | |
|---|---|---|
| OEM | Applied Materials | CHA |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | CHA Mark 40 |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | 26" Diameter by 26" Long Process Chamber[2] |
| Model | 0010-13622[1] | — |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| System Wiring | — | 120/280 V[2] |
| Phase | — | 3 Phase, 5 Wire, 60 cycle[2] |
| Process Chamber Diameter | — | 26 inches[2] |
| Process Chamber Length | — | 26 inches[2] |
| Cryopump Model | — | Brooks CTI On-Board 400 Cryopump[2] |
| Dry Pump Model | — | Ebara Model EV-A10-2U Dry Pump[2] |
| High-Vacuum Valve | — | VAT High-Vac Valve[2] |
| Ionization Gauge Controller | — | Granville-Phillips Model 307 Digital Ionization Gauge Controller[2] |
| Electron Beam Gun | — | CHA SmartSource Electron Beam Gun with Motor Driven Crucible Rotation and Lid Lift[2] |
| Auto Regeneration Control | — | CTI On-Board Auto Regeneration Control[2] |
| Chamber Door Type | — | Water Cooled Chamber Front Door[2] |
| Rear Chamber Door | — | Hinged Rear Chamber Door[2] |
| Chamber Shields | — | Complete Sets of Chamber Shields[2] |
| Cabinet | — | Modern Metal Cabinet[2] |
| Electrical Drop Box | — | Single Service Electrical Drop Box[2] |
| Soft Vent | — | Present[3] |
| Soft Roughing | — | Present[3] |
| Lift-Off Fixturing | — | Present[3] |
| Source Viewing Mirror Array | — | Present[2] |
| Flag Shutter Assembly | — | Present[2] |
| RGA Isolation Valve and Interlock | — | Present[2] |
| System Indication Light Tower | — | Present[2] |
| Chamber Size | — | 26" Diameter by 26" Long Process Chamber[2] |
| Chamber Door | — | Water Cooled Chamber Front Door, Hinged Rear Chamber Door[2] |
| Vacuum Pump | — | Brooks CTI On-Board 400 Cryopump[2] |
| Dry Pump | — | Ebara Model EV-A10-2U Dry Pump[2] |
| Electrical Power | — | 120/280 V, 3 Phase, 5 Wire, 60 cycle[2] |
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