Waferpedia

Comparison ledger

0010-03485 Magnet AssyversusCG5000

Applied Materials 0010-03485 Magnet Assy, Hitachi CG5000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
CG5000Hitachi
OEMApplied MaterialsHitachi
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2014 Date of manufacture
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyHitachi CG5000
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]—
Model0010-03485[1]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]Scanning Defect[5]
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Date of Manufacture—2014-05-01[5]
Currently Configured for—300mm[5]
Tool current condition—Power on, not on production[5]
Software Version—58.52[5]
System Power Rating—208 AC 1 Phase[5]
Loading Configuration—3 L/Ps[5]
Technology—CD-SEM[6]
Application—Applications for wafers[6]
Measurement characteristics—measurement, high-resolution, high-throughput[6]
Configured wafer size—300mm[5]
Year(s)—2014[5]
Year of Manufacture—2014-05-01[5]
Wafer Size—300mm[5]
Electron Beam Voltage (Postdevelop L/S CD)—500 eV[7]
Electron Beam Voltage (Postetch LCDU)—800 eV[7]
Technology Node—sub-22nm[6]
Measurement Type—CD-SEM[5]
Measurement type—critical-dimension (CD) measurement[5]
Performance—high-resolution, high-throughput, high-repeatability[6]
Calibration—enhanced automatic calibration[6]
Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]dealer listingwotol.com
  6. [6]automationexpo.comautomationexpo.com
  7. [7]globalsino.comglobalsino.com