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0010-03485 Magnet AssyversusPfeiffer TPU 240 Turbomolecular

Applied Materials 0010-03485 Magnet Assy, Balzers Pfeiffer TPU 240 Turbomolecular, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsBalzers
Category——
Wafer size——
Process node——
Introduced——
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FamilyApplied Materials 0010-03485 Magnet AssyBalzers Pfeiffer TPU
Cited variants—
  • TPU 240Classic Line[1]
Specifications
ConfigurationWP AL 300mm PVD[2]—
OEMApplied Materials[2]Balzers Pfeiffer[6]
Model0010-03485[2]TPU 240[6]
DescriptionMAGNET ASSY, WP AL 300MM PVD[3]—
ProcessPVD[4]—
Wafer size300mm[5]—
VersionSpares[5]—
Part Number0010-03485[2]PMP01330A[1]
ManufacturerApplied Materials[2]Balzers Pfeiffer[6]
Process TypePVD (Physical Vapor Deposition)[2]—
Application (Material)Aluminum (AL)[2]—
Wafer Diameter (associated)300 mm[2]—
Volume Flow Rate—230[6]
Condition—Refurbished[1]
High-Vacuum Inlet Flange—DN 100 CF-F (6" ConFlat Fixed)[1]
Foreline / Exhaust Flange—DN 25 ISO-KF (NW25)[1]
Pumping Speed (N2)—230 L/s[1]
Pumping Speed (He)—240 L/s[1]
Pumping Speed (H2)—210 L/s[1]
Compression Ratio (N2)—1 × 10^8[1]
Ultimate Base Pressure—≤ 1 × 10^-11 mbar (≤ 7.5 × 10^-12 Torr)[1]
Nominal Rotational Speed—60,000 RPM[1]
Ramp-Up / Start Time—≈ 1 to 3 minutes[1]
Cooling Method—Natural Convection / Forced Air / Water-Cooling (15 L/h at 15 °C)[1]
Lubricant Charge—8 cm^3 F4 / F5 Operating Fluid Wick Compatible Controllers[1]
Weight—9.0 kg (19.8 lbs)[1]
Equipment type—Turbomolecular pump[6]
Part number—PM P01 330 A (PMP01330A)[1]
Lubricant charge—8 cm3 F4 / F5 operating fluid wick compatible[1]
Compatible controllers—Pfeiffer TCP 121 / TCP 380 / TCP 300 series[1]
Make—Balzers Pfeiffer[6]
Type of product—turbo pump[7]
Inlet—6" conflat[7]
Exhaust—KF25[7]
Vent valve—fixed[7]
Pumping speed—230 l/s (N2)[7]
Compression ratio—10^8 (N2)[7]
Recommended controller—TCP-121, TCP-380[7]
Recommended backing pump—DUO 016B[7]
Device type—Turbomolecular pump[6]
Sources (7)Every fact above is drawn from these public sources
  1. [1]labvac.comlabvac.com
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]layla-ec.comlayla-ec.com
  5. [5]fabsurplus.comfabsurplus.com
  6. [6]inventory listing
  7. [7]provac.comprovac.com