Comparison ledger
Applied Materials 0010-03254 E Chuck, Zygo 7300, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | 7300Zygo |
|---|---|---|
| OEM | Applied Materials | Zygo |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Zygo 7300 |
| Cited variants | — |
|
| Specifications | ||
| Scan Speed | — | ≤135 µm/sec[2] |
| System Zoom | — | Auto; multi (3 pos)[2] |
| Max Scan Range | — | ≤20 mm[2] |
| Objectives | — | From 1X to 100X[2] |
| Max Field of View | — | 14 mm standard; 22 mm optional (with megapixel camera)[2] |
| Turret Options | — | Motorized or Manual (6 Position)[2] |
| Z Stage | — | Motorized (100 mm travel)[2] |
| X-Y Stages | — | Manual (100 mm travel) or Motorized (150 mm travel)[2] |
| Tip/Tilt Stage | — | Manual or Motorized[2] |
| Encoded Z, X-Y Stage | — | Yes (optional)[2] |
| Measurement Principle | — | Scanning white light interferometry (SWLI)[2] |
| Height Resolution | — | 0.1 nm[2] |
| Model | — | 7300[3] |
| Make | — | Zygo[3] |
| Category | — | Laboratory Equipment[4] |
| Type | — | 3D optical surface profiler / profilometer[1] |
| Measurement principle | — | Scanning white light interferometry[1] |
| Measurement method | — | Scanning white light interferometry (SWLI)[2] |