Waferpedia

Comparison ledger

0010-03254 E Chuckversus20L 100V 200W Ion Pump Set

Applied Materials 0010-03254 E Chuck, Varian 20L 100V 200W Ion Pump Set, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsVarian
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Varian 20L 100V 200W Ion Pump Set
Specifications
Configuration—911-5036 20 Litre Ion Pumps with Magnet[1]
Pump Volume—20 litres each[1]
Operating Voltage—100V[1]
Power—200W[1]
Part Number—911-5036[1]
Fitting—304 LN ESR[1]
Compatible SEM Models—Hitachi S-4200, S-4500[1]
Pump Configuration—911-5036 20 Litre Ion Pumps with Magnet[1]
Pump Volume (each)—20 litres[1]
Quantity sold as set—2[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing